PHOTORESIST REMOVAL SYSTEM
Kojair Clean Ace is innovative solution for removing photoresist from process tool parts. Flammable solvents such as acetone can safely be used in it's fully automated cleaning process.
Work safety
Clean Ace's inert cleaning process considerably improves work safety. the operators are not exposed to solvent at any time.
Protecting the environment
Clean Ace notably reduces solvent consumption and vaporization of environmentally hazardous solvent fumes compared to all other methods in use today.
Improving quality
The cleaning process is PLC controlled. Parts covered with photoresist are cleaned according to a preset process. This guarantees the result compared to manual cleaning, where the possibility for human error is considerable.
|
|
Easy to use
Place the photoresist-covered parts into the rack. Close the door and press start button. The device automatically ensures safe internal conditions before the actual process.
Effortless process management
All process management details, e.g. solvent spray times, can be adjusted using the operator's terminal.
Simple to service
Service areas can be directly accessed from the front, sides and back of the device. All components have been tested and classified as acetone-proof. The Clean Ace Service Manual assists the user in routine maintenance.
|
|
| Checking switches |
Function |
| O2 Sensor (optional) |
monitors the amount of O2, keeping them within safe limits in the working chamber |
| Exhaust sensor |
monitors exhaust air volume |
| N2 pressure |
monitors the pressure of N2 |
| Leak sensor |
monitors the system for possible leaks |
| Overfill sensor |
monitors the filling level of the internal solvent tank |
| Flame sensor (optional) |
detects possible flame flash and stops all functions |
| Door switches |
verifies that the doors are closed and locked during the process |
| Properties |
Benefits |
| Mitsubishi PLC control unit |
programmable logic guarantees safety, quality and reliability |
| Electropolished stainless steel process chamber |
no particle generation |
| Diaphragm pump for spraying solvent |
sufficient washing pressure, efficient cleaning |
| Electropolished stainless steel structure |
fully cleanroom compatible |
| Acetone buffer tank and a logic-controlled washing valve device stack |
saves solvent; average use approx. 2,2 liters per wash |
|
|
Easy to install
The Clean Ace Spray Tool can be configured for hook-up from the side or from the back. All fittings are according to industry standard.
System safety
The Clean Ace Spray Tool has been designed to be as safe to operate as possible. Valves that are closed by default are used wherever necessary. All materials are fireproof and acetone proof. The system stops automatically if any of the safety switches is activated. The construction contains minimal amount of plastic material.
Additional information: Jouko Värikoski |
|
|
